1

Chapter 1: Introduction to MEMS, Scaling Law

2

Chapter 2: Principles of Sensors

3

Chapter 3: Electroanalytical Biosensors

4

Chapter 4: Biomechanical Sensors

5

Chapter 5: Electrostatic Actuation

6

Chapter 6: Acoustic Wave Biosensors and CMUT

7

Chapter 7: Thermal Sensors

8

Chapter 8: Optical Transducers

9

Chapter 9: Optical Spectroscopy

10

Chapter 10: Microfluidics and Soft Lithography

11

Chapter 11: Mico Total Analysis Systems (uTAS): LAB-ON-A-CHIP

12

Chapter 12: Nanotechnology and Nanosensors