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Chapter 1: Introduction to MEMS, Scaling Law
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Chapter 2: Principles of Sensors
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Chapter 3: Electroanalytical Biosensors
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Chapter 4: Biomechanical Sensors
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Chapter 5: Electrostatic Actuation
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Chapter 6: Acoustic Wave Biosensors and CMUT
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Chapter 7: Thermal Sensors
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Chapter 8: Optical Transducers
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Chapter 9: Optical Spectroscopy
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Chapter 10: Microfluidics and Soft Lithography
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Chapter 11: Mico Total Analysis Systems (uTAS): LAB-ON-A-CHIP
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